KGM 181

KGM 182

Measuring standard

Two-coordinate TITANID phase grating on glass (grid)

Two-coordinate TITANID phase grating on glass (grid)

Thermal expansion coefficient

α_therm = 8 · 10^-6 K^-1

α_therm = 8 · 10^-6 K^-1

Accuracy grade

± 2 µm

± 2 µm

Measuring range

ø 140 mm

ø 230 mm

Output signals

1 V_PP

1 V_PP

Signal period

4 µm in measuring directions I and II

4 µm in measuring directions I and II

Recommended measuring step

≥ 0.001 µm (IK 220)

≥ 0.001 µm (IK 220)

Power supply

5V ±5%/< 100 mA (per axis)

5V ±5%/< 100 mA (per axis)

Tool holder

Scanning head ø 20h7

Scanning head ø 20h7

Max. traversing speed

≤ 80 m/min

≤ 80 m/min

Evaluation electronics (included in delivery)

IK 220 PC counter card

IK 220 PC counter card

Evaluation software (included in delivery)

ACCOM

ACCOM

Electrical connection

• Cable 0.5 m with D-sub connector (15-pin); Interface electronics are integrated in the connector

• Separate adapter cable, length 3 m, for connecting to IK 220

• Cable 0.5 m with D-sub connector (15-pin); Interface electronics are integrated in the connector

• Separate adapter cable, length 3 m, for connecting to IK 220

Weight

Grid plate approx. 4.0 kg
Scanning head approx. 0.6 kg

Grid plate approx. 3.1 kg
Scanning head approx. 0.6 kg